Measurement of profiled surfaces using polarising optical interferometry

Barman, Sarah Ann (1996) Measurement of profiled surfaces using polarising optical interferometry. (PhD thesis), King's College, University of London.

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Item Type: Thesis (PhD)
Physical Location:
Uncontrolled Keywords: microscopy, semiconductor surfaces, optics measurement
Research Area: Computer science and informatics
Physics
Faculty, School or Research Centre: Faculty of Computing, Information Systems and Mathematics (until 2011)
Depositing User: Automatic Import Agent
Date Deposited: 15 Sep 2011 08:58
Last Modified: 19 Sep 2012 13:55
URI: http://eprints.kingston.ac.uk/id/eprint/8943

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